Characteristics of a nitrogen gas-pulsed electron cyclotron resonance plasma

Title
Characteristics of a nitrogen gas-pulsed electron cyclotron resonance plasma
Authors
박용주김은규민석기K. OzasaP. O'KeeffeY. Aoyagi
Keywords
질소 가스펄스 플라즈마; ECR; 전자온도; transient profile
Issue Date
1996-07
Publisher
응용물리; Ungyong Mulli (The Korean physical society)
Citation
VOL 9, NO 4, 444-449
URI
http://pubs.kist.re.kr/handle/201004/9429
Appears in Collections:
KIST Publication > Article
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