Formation of SiC layer on single crystal Si using hot-filament reactor

Title
Formation of SiC layer on single crystal Si using hot-filament reactor
Authors
김홍석최인훈은광용백영준
Keywords
SiC
Issue Date
1998-03
Publisher
한국세라믹학회지; Journal of the Korean Ceramic Society
Citation
VOL 4, NO 1, 25-27
URI
http://pubs.kist.re.kr/handle/201004/9473
ISSN
1229-7801
Appears in Collections:
KIST Publication > Article
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