A study on fabrication of piezoresistive pressure sensor based on poly-Si

Title
A study on fabrication of piezoresistive pressure sensor based on poly-Si
Authors
임재홍박용욱윤석진정형진윤영수
Keywords
piezoresistivity; poly-crystalline silicon; pressure sensor; diaphragm thickness
Issue Date
1999-05
Publisher
한국전기전자재료학회 '99 춘계학술대회 논문집
Citation
, 677-680
URI
http://pubs.kist.re.kr/handle/201004/9485
Appears in Collections:
KIST Publication > Conference Paper
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