Vacuum packaging and operating properties of micro-tunneling sensors

Title
Vacuum packaging and operating properties of micro-tunneling sensors
Authors
주병권박흥우이덕중손용배박정호오명환
Keywords
MEMS
Issue Date
2000-04
Publisher
5th ISMP
Citation
, 110-110
URI
http://pubs.kist.re.kr/handle/201004/9498
Appears in Collections:
KIST Publication > Conference Paper
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