희생적 식각 마스크를 이용한 나노 구조물 제조방법

Author
하승규김수연송진동최원준한일기
Assignee
한국과학기술연구원
Regitration Date
2013-10-23
Registration No.
1323218
Application Date
2012-07-26
Application No.
2012-0081674
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/95465
Appears in Collections:
KIST Patent > 2012
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