Hybrid microassembly system for three-dimensional MEMS components

Title
Hybrid microassembly system for three-dimensional MEMS components
Authors
김경환김덕호이석주이재훈
Keywords
hybrid; microassembly; MEMS; micromanipulation
Issue Date
2002-09
Publisher
Proceedings of 2002 Int'l Workshop on Microfactory
Citation
, 21-24
URI
http://pubs.kist.re.kr/handle/201004/9565
Appears in Collections:
KIST Publication > Conference Paper
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