SOI 웨이퍼를 이용한 압전박막 공진기의 설계 및 제작

Title
SOI 웨이퍼를 이용한 압전박막 공진기의 설계 및 제작
Authors
김인태박윤권이시형이윤희이전국김남수주병권
Keywords
FBAR
Issue Date
2002-04
Publisher
제 4 회 한국 MEMS 학술대회초록집
Citation
, 250-255
URI
http://pubs.kist.re.kr/handle/201004/9575
Appears in Collections:
KIST Publication > Conference Paper
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