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dc.contributor.author문명운-
dc.contributor.author김해리-
dc.contributor.author이진우-
dc.contributor.author이광렬-
dc.date.accessioned2024-01-12T20:31:33Z-
dc.date.available2024-01-12T20:31:33Z-
dc.date.issued2015-06-11-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/95903-
dc.title실리콘 함유 다이아몬드상 카본 박막, 그 제조방법 및 용도-
dc.typePatent-
dc.date.registration2015-06-11-
dc.date.application2012-05-24-
dc.identifier.patentRegistrationNumber10-1529527-
dc.identifier.patentApplicationNumber10-2012-7013507-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2012
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