KIST Library Institutional Repository

고체 원소 플라즈마 이온주입 방법 및 장치

Author

한승희; 변지영; 석현광; 신상범; 김유찬; 이성배; 최진영; 한준현

Assignee

한국과학기술연구원

Regitration Date

2015-09-22

Registration No.

9,139,902

Application Date

2011-03-10

Application No.

13/044,621

Country

US

URI

https://pubs.kist.re.kr/handle/201004/95935

Appears in Collections:

KIST Patent > 2011

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