질소이온 주입된 질화텅스텐박막의 구리배선용 확산방지막 특성 .

Title
질소이온 주입된 질화텅스텐박막의 구리배선용 확산방지막 특성 .
Authors
김용태권철순김동준민석기
Issue Date
1995-01
Publisher
제 2 회 한국반도체학술대회
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/9635
Appears in Collections:
KIST Publication > Conference Paper
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