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이중파장　영사식　모아레기반　형상측정장치　및　레지스트레이션을　이용한　멀티헤드　시스템용　자동　캘리브레이션　방법

Author

노형민; 박세형; 전용태; 강영준

Assignee

한국과학기술연구원

Regitration Date

2005-04-06

Registration No.

0483345

Application Date

2002-06-18

Application No.

2002-0034157

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/96463

Appears in Collections:

KIST Patent > 2002

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