실리콘을 함유한 초경질 다이아몬드상 탄소박막 및 그 제조방법

Author
이광렬이철승윤기현
Assignee
한국과학기술연구원
Regitration Date
2004-06-08
Registration No.
0436565
Application Date
2001-10-31
Application No.
2001-0067540
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/96473
Appears in Collections:
KIST Patent > 2001
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