반도체 기판과 백금 전극간의 접착력 향상 방법 및 반도체용 백금 전극 구조

Author
조정고석근
Assignee
한국과학기술연구원
Regitration Date
2004-09-22
Registration No.
0451415
Application Date
2002-01-28
Application No.
2002-7001202
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/96537
Appears in Collections:
KIST Patent > 2002
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