KIST Library Institutional Repository

실리콘　반도체소자의　텅스텐/텅스텐 질화박막　금속배선　형성방법

Author

김용태; 민석기

Assignee

한국과학기술연구원

Regitration Date

1995-09-20

Registration No.

89414

Application Date

1992-05-16

Application No.

92-8318

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/96608

Appears in Collections:

KIST Patent > Others

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