실리콘기판상에 성장된GaAs에피택셜층의 유기금속화학 증착법에 의한 델타-도핑형성 방법

Author
민석기김무성김용
Assignee
한국과학기술연구원
Regitration Date
1995-11-08
Registration No.
1986262
Application Date
1991-07-31
Application No.
3-192166
Country
JA
URI
https://pubs.kist.re.kr/handle/201004/96612
Appears in Collections:
KIST Patent > Others
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