KIST Library Institutional Repository

실리콘　반도체소자의　금속배선　형성용텅스텐　질화　박막증착방법

Author

민석기; 김용태

Assignee

한국과학기술연구원

Regitration Date

1994-03-23

Registration No.

72153

Application Date

1991-07-16

Application No.

91-12125

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/96613

Appears in Collections:

KIST Patent > Others

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