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dc.contributor.authorPark Dong Hee-
dc.contributor.authorYang Jeong-do-
dc.contributor.authorJi-Won Choi-
dc.contributor.authorCHOI, WON-KOOK-
dc.date.accessioned2024-01-12T21:05:17Z-
dc.date.available2024-01-12T21:05:17Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/96717-
dc.languageEnglish-
dc.subjectZinc Oxide-
dc.subjectTransparent conducting oxide-
dc.subjectHIPIMS-
dc.titleCharacteristics of Al:doped ZnO thin films by HIPIMS (High Power Impulse Magnetron sputtering) with unbalanced magnetron-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationInternational Symposium on Transparent Conductive Coatings-
dc.citation.titleInternational Symposium on Transparent Conductive Coatings-
dc.citation.conferencePlaceKO-
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