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이층　미세구조를　가지는　질화규소　소재　및　그의　제조방법

Author

이준근; 김영욱; 박태희; 최헌진

Assignee

한국과학기술연구원

Regitration Date

1998-12-15

Registration No.

0183363

Application Date

1997-03-14

Application No.

1997-0008754

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/97018

Appears in Collections:

KIST Patent > Others

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