KIST Library Institutional Repository

질소　공급원으로서　질소　원자－활성　종을　사용하는　유기금속　화학증착에　의한　I I I족　금속　질화물　박막

Author

금동화; 김주성; 김진상; 이지화

Assignee

한국과학기술연구원

Regitration Date

2002-07-12

Registration No.

0346015

Application Date

1999-11-30

Application No.

1999-0053735

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/97075

Appears in Collections:

KIST Patent > Others

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