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dc.contributor.author이도권-
dc.contributor.author김진환-
dc.contributor.author김인호-
dc.contributor.author장윤희-
dc.contributor.author이하람-
dc.date.accessioned2024-01-12T21:33:23Z-
dc.date.available2024-01-12T21:33:23Z-
dc.date.issued2023-06-09-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/97167-
dc.title시소운동이 적용된 기판장착장치-
dc.typePatent-
dc.date.registration2023-06-09-
dc.date.application2020-11-27-
dc.identifier.patentRegistrationNumber10-2543415-
dc.identifier.patentApplicationNumber10-2020-0162615-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2020
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