KIST Library Institutional Repository

반도체 메모리 소자의 커패시터 유전막 및 그 제조 방법

Author

김성근; 이우철; 김상태; 송현철; 백승협; 에릭 라슨; 김진상; 강종윤; 크리스토퍼 빌라브스키; 염정환; 최지원

Assignee

한국과학기술연구원

Regitration Date

2022-08-16

Registration No.

11417516

Application Date

2018-12-19

Application No.

16/225432

Country

US

URI

https://pubs.kist.re.kr/handle/201004/97647

Appears in Collections:

KIST Patent > 2018

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML