Filling-up effect of micro-gap by interfacial oxide growing in SFB process

Title
Filling-up effect of micro-gap by interfacial oxide growing in SFB process
Authors
강광남주병권이재옥김철주오명환차균현이명복
Keywords
interfacial oxide growing
Issue Date
1991-08
Publisher
전자공학회논문지
Citation
VOL 28A, NO 2, 71-76
URI
http://pubs.kist.re.kr/handle/201004/9793
Appears in Collections:
KIST Publication > Article
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