Epitaxial growth for GaAs IC.

Title
Epitaxial growth for GaAs IC.
Authors
박용주김무성김용조훈영김성일민석기엄경숙
Keywords
반절연기판; MOCVD; MBE; 누설전류
Issue Date
1993-01
Publisher
한국재료학회지; Korean journal of materials research
Citation
v. 3, no. 6, 645-651
URI
http://pubs.kist.re.kr/handle/201004/9821
Appears in Collections:
KIST Publication > Article
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