환형 실세스퀴옥산을 이용한 실록산계 저유전막 및 이의 제조방법

Author
최승석백경열황승상나종범이희승김은경오성연
Assignee
한국과학기술연구원
Regitration Date
2013-01-15
Registration No.
10-1224514
Application Date
2010-07-05
Application No.
2010-0064332
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/98756
Appears in Collections:
KIST Patent > 2010
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