Inhibition of surface insolubilization in chemically amplified positive type deep-UV resists.

Title
Inhibition of surface insolubilization in chemically amplified positive type deep-UV resists.
Authors
안광덕양승관박찬언강종희
Keywords
deep UV resists
Issue Date
1994-07
Publisher
폴리머; Polymer(Korea)
Citation
v. 18, no. 4, 622-631
URI
http://pubs.kist.re.kr/handle/201004/9879
Appears in Collections:
KIST Publication > Article
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