DSpace at KISTKIST PublicationArticle

Inhibition of surface insolubilization in chemically amplified positive type deep-UV resists.

Title
Inhibition of surface insolubilization in chemically amplified positive type deep-UV resists.
Authors
안광덕; 양승관; 박찬언; 강종희
Keywords
deep UV resists
Issue Date
1994-07
Publisher
폴리머; Polymer(Korea)
Citation
v. 18, no. 4, 622-631
URI
http://pubs.kist.re.kr/handle/201004/9879
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Full Item Record


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE