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A study on the growth behaviors of MoSi2 diffusion layer formed by CVD of Si on Mo substrate

Title
A study on the growth behaviors of MoSi2 diffusion layer formed by CVD of Si on Mo substrate
Authors
윤진국; 변지영; 김재수; 최종술
Keywords
chemical vapor deposition
Issue Date
1995-01
Publisher
대한금속학회지; Journal of the Korean inst. of met. & mater.
Citation
v. 33, no. 11, 1537-1543
URI
http://pubs.kist.re.kr/handle/201004/9897
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KIST Publication > Article
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