A study on the surface modification of graphite by CVD SiC : Growth characteristics of SiC in a horizontal CVD reactor

Title
A study on the surface modification of graphite by CVD SiC : Growth characteristics of SiC in a horizontal CVD reactor
Authors
김동주최두진김영욱박상환
Keywords
Silicon carbide; CVD; Depletion effect; Preferred orientation
Issue Date
1995-01
Publisher
요업학회지; Journal of the Korean Ceramic Society
Citation
VOL 32, NO 4, 419-428
URI
http://pubs.kist.re.kr/handle/201004/9902
Appears in Collections:
KIST Publication > Article
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