Measurements of lattice strain in SiO//2Si interface using convergent beam electron diffraction.

Title
Measurements of lattice strain in SiO//2Si interface using convergent beam electron diffraction.
Authors
김긍호우현정최두진
Keywords
lattice strain
Issue Date
1995-01
Publisher
한국전자현미경학회지; Korean journal of electron microscopy
Citation
v. 25, no. 2, 73-79
URI
http://pubs.kist.re.kr/handle/201004/9907
Appears in Collections:
KIST Publication > Article
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