Creation of high-peak plasma-pulses and control of surface reaction in short-pulsed chemical beam epitaxy.

Title
Creation of high-peak plasma-pulses and control of surface reaction in short-pulsed chemical beam epitaxy.
Authors
박용주K. OzasaY. Aoyagi
Keywords
SP-CBE
Issue Date
1995-02
Publisher
이연シンポジウム제4회반응제어による표면가공기술
Citation
, 11-14
URI
http://pubs.kist.re.kr/handle/201004/9909
Appears in Collections:
KIST Publication > ETC
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