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Effect of gradient buffer layer prepared with different substrate bias on the adhesion of cBN film deposited by R.F. magnetron sputtering with B4C target and unipolar pulsed D.C. substrate bias

Authors

Lee Seung-min; Baik, Young Joon; Lee, Wook Seong; Tae-Yeon Seong; JONG-KEUK, PARK

Citation

10th APCPST (Asia Pacific Conference on Plasma Science and Technology)

Keywords

cBN; gradient layer; adhesion; B4C; sputtering

URI

https://pubs.kist.re.kr/handle/201004/99111

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KIST Conference Paper > Others

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