Property of tin-oxide thin films grown using a reactive-metal ion beam, an oxygen gas ion beam, and a hybrid ion beam

Title
Property of tin-oxide thin films grown using a reactive-metal ion beam, an oxygen gas ion beam, and a hybrid ion beam
Authors
송석균최원국정형진고석근이정용백홍구
Keywords
ion beam
Issue Date
1996-01
Publisher
Ungyong Mulli (The Korean physical society)
Citation
VOL 9, NO 5, 686-694
URI
http://pubs.kist.re.kr/handle/201004/9957
Appears in Collections:
KIST Publication > Article
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