Kinetics of metal organic chemical vapor deposition of boron nitride.

Title
Kinetics of metal organic chemical vapor deposition of boron nitride.
Authors
이상열남영우이중기박달근
Keywords
BN
Issue Date
1996-01
Publisher
화학공학의 이론과 응용; Theories and applicatons of chem. eng.
Citation
v. 2, no. 2, 2551-2554
URI
http://pubs.kist.re.kr/handle/201004/9964
Appears in Collections:
KIST Publication > Conference Paper
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