질화규소막 또는 산화규소막으로 코팅된 고온용 흑연실험용기 및 그의  제작 방법

Author
임태훈이중기오인환홍성안남석우우주만
Assignee
한국과학기술연구원
Regitration Date
1997-08-11
Registration No.
120018
Application Date
1994-07-20
Application No.
94-17484
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/99872
Appears in Collections:
KIST Patent > Others
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