KIST Library Institutional Repository

전자싸이크로트론　공명　플라즈마에서　활성이온　및　활성분자（또는　활성원　자）생성율　제어방법

Author

박용주; 민석기; 김은규

Assignee

한국과학기술연구원

Regitration Date

2000-08-03

Registration No.

270607

Application Date

1997-11-04

Application No.

97-57886

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/99922

Appears in Collections:

KIST Patent > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML