Showing results 2 to 3 of 3
Issue Date | Title | Author(s) |
---|---|---|
- | Improvement in the characteristics of ammonia plasma treated MSQ(Methyl Silsesquioxane) | 심현상; 김동준; KIM CHUN KEUN; Kim Seong Il; Kim Yong Tae; 전형탁 |
- | Structural and micromechanical characteristics of low-dielectric organosilicate thin films modified by NH₃ plasma treatment | 차국헌; 주상현; 김수한; 심현상; Kim Yong Tae; 한진희; 이진규; 윤도영 |