Showing results 4 to 5 of 5
Issue Date | Title | Author(s) |
---|---|---|
1995-01 | Plasma deposited amorphous tungsten nitride diffusion barrier for metal-organic chemical vapor deposited Cu metallization | Kim, Yong Tae; Lee, Chang Woo |
2007-02 | Tungsten nanodot arrays patterned using diblock copolymer templates | Kang, Gil Bum; Kim, Seong-Il; Kim, Young Hwan; Park, Min-Chul; Kim, Yong Tae; Lee, Chang Woo |