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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
-Characteristics of pulse plasma enhanced atomic layer deposition of tungsten nitride diffusion barrier for copper interconnect심현상; Kim Yong Tae; 전형탁
-Characteristics of W-N diffusion barrier by atomic layer chemical vapor deposition심현상; Kim Yong Tae; 전형탁
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