DSpace at KIST

Browsing bySubjectGSI

Jump to:
All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
가 나 다 라 마 바 사 아 자 차 카 타 파 하
  • Sort by:
  • In order:
  • Results/Page
  • Authors/Record:

Showing results 1 to 1 of 1

Issue DateTitleAuthor(s)
2001-03Improvement of the reliability of a Cu/W-N/SiOF multilevel interconnect by inserting plasma enhanced chemical vapor deposited W-N thin filmKim, DJ; Sim, HS; Lee, S; Kim, YT; Kim, SI; Park, JW
1

BROWSE