Browsing bySubjectbulk micromachining

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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
2020-01Bulk Micromachining of Si by Annealing-Driven Magnetically Guided Metal-Assisted Chemical EtchingKim, Tae Kyoung; Bae, Jee Hwan; Kim, Juyoung; Kim, Yu-Chan; Jin, Sungho; Chun, Dong Won
2000-01Fabrication of piezoresistive pressure sensor based on poly-Si윤영수; 임재홍; 윤석진
2005-04-15Properties of piezoelectric actuator on silicon membrane, prepared by screen printing methodKim, SJ; Kang, CY; Choi, JW; Kim, DY; Sung, MY; Kim, HJ; Yoon, SJ

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