Showing results 1 to 3 of 3
Issue Date | Title | Author(s) |
---|---|---|
2020-01 | Bulk Micromachining of Si by Annealing-Driven Magnetically Guided Metal-Assisted Chemical Etching | Kim, Tae Kyoung; Bae, Jee Hwan; Kim, Juyoung; Kim, Yu-Chan; Jin, Sungho; Chun, Dong Won |
2000-01 | Fabrication of piezoresistive pressure sensor based on poly-Si | 윤영수; 임재홍; 윤석진 |
2005-04-15 | Properties of piezoelectric actuator on silicon membrane, prepared by screen printing method | Kim, SJ; Kang, CY; Choi, JW; Kim, DY; Sung, MY; Kim, HJ; Yoon, SJ |