Browsing bySubjectcurved Si structure

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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2020-01Bulk Micromachining of Si by Annealing-Driven Magnetically Guided Metal-Assisted Chemical EtchingKim, Tae Kyoung; Bae, Jee Hwan; Kim, Juyoung; Kim, Yu-Chan; Jin, Sungho; Chun, Dong Won
2020-08Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical EtchingKim, Tae Kyoung; Bae, Jee Hwan; Kim, Juyoung; Cho, Min Kyung; Kim, Yu-Chan; Jin, Sungho; Chun, Dongwon

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