- | 3D 패키징 적용을 위한 박막 실리콘 기판을 이용한 RF-MEMS 패키징 . | 김용국; 박윤진; 김철주; Ju Byeong Kwon |
- | A novel wafer level packaging of the RF-MEMS devices with low loss | 박윤권; 이덕중; 박흥우; 송인상; 김정우; SONG CI MOO; LEE YUN HI; 김철주; Ju Byeong Kwon |
2000-10 | A study on Fabrication of Thermopile Infrared Detector | 이성준; 주병권; 이윤희; 서상희; 오영제; 김태윤; 김철주 |
- | Characteristic estimation of the formation and etching of PZT thin films for pyroelectric IR sensor application | 박윤권; Ju Byeong Kwon; 전호승; Yoon Young Soo; Oh Young-Jei; LEE YUN HI; SUH SANG HEE; OH MYUNG HWAN; 김철주 |
- | DLC-coated knife-edge field emitter arrays on (110) Si wafer | Ju Byeong Kwon; OH MYUNG HWAN; 고창기; Jung Jae Hoon; 김철주 |
- | Effect of wet-etching process on the gate insulator of metal tip FEA | 정유호; Ju Byeong Kwon; Jung Jae Hoon; LEE YUN HI; OH MYUNG HWAN; 김철주 |
- | Elimination of hole traps on Si wafer using reoxidation method | 홍순관; Ju Byeong Kwon; 김철주 |
- | Etching-bonding-thin film deposition process for MEMS-IR SENSOR application | 박윤권; Ju Byeong Kwon; 박흥우; PARK JEONG HO; Sang-Seop Yom; SUH SANG HEE; OH MYUNG HWAN; 김철주 |
1994-02 | Fabrication and characterization of silicon devices for flow measurement (II) | 주병권; 고창기; 김철주; 차균현; 오명환 |
- | Fabrication and characterization of silicon field emission device | 고창기; Jung Jae Hoon; Ju Byeong Kwon; 장진; 김철주; OH, MYUNG HWAN |
2001-09 | Fabrication and packaging of the vacuum magnetic field sensor | 박흥우; 박윤권; 이덕중; 김철주; 박정호; 오명환; 주병권 |
1997-06 | Fabrication and performance improvement of silicon cold electron source having a whisker-shapped cross-sectional structure | 주병권; 고창기; 이윤희; 정재훈; 이병호; 김철주; 오명환 |
- | Fabrication of (100), (110), (111) Si tip using various wet etching method | 박흥우; Ju Byeong Kwon; KO CHANG GI; 홍순관; OH MYUNG HWAN; 김철주 |
- | Fabrication of knife type Si tip array by orientatio dependent etching of single silicon substrate | 정유호; 고창기; 김철주; Ju Byeong Kwon; OH MYUNG HWAN |
- | Fabrication of piezoresistive pressure sensor and its application to digital pressure guage | 하병주; Ju Byeong Kwon; 박선우; 차균현; OH MYUNG HWAN; 김철주 |
- | Fabrication of Si tips for field emission devices | Ju Byeong Kwon; OH MYUNG HWAN; 박흥우; 하병주; 박재홍; 김철주 |
- | Fabrication of un-cooled infrared sensor using pyroelectric thin film | 박윤권; Ju Byeong Kwon; 박흥우; Yoon Young Soo; Sang-Seop Yom; Oh Young-Jei; PARK JEONG HO; SUH SANG HEE; OH MYUNG HWAN; 김철주 |
1991-08 | Filling-up effect of micro-gap by interfacial oxide growing in SFB process | 강광남; 주병권; 이재옥; 김철주; 오명환; 차균현; 이명복 |
1994-10 | Formation of silicon diaphragm using silicon-wafer direct bonding / electrochemical etch-stopping and its application to silicon pressure sensor fabrication | 주병권; 하병주; 김근섭; 송만호; 김성환; 김철주; 차균현; 오명환 |
- | MEMS-IR sensor fabrication and characterization | Ju Byeong Kwon; 박흥우; 박윤권; PARK JEONG HO; 김철주; Sang-Seop Yom; SUH SANG HEE; OH MYUNG HWAN |
- | Micro-tunneling sensor for vacuum level evaluation of field emission display | 박흥우; Ju Byeong Kwon; 박윤권; 김철주; OH MYUNG HWAN |
- | Micro-tunneling sensors for vacuum level evaluation of field emission display devices | 박흥우; Ju Byeong Kwon; 박윤권; 김철주; OH MYUNG HWAN |
1992-01 | Microscopy study for the batch fabrication of silicon diaphragm | 하병주; 주병권; 차균현; 오명환; 김철주 |
- | Packaging of the MEMS devices using thin silicon wafer | 박윤권; 김용국; Kim Hun; LEE YUN HI; 김철주; Ju Byeong Kwon |
- | Packaging of the RF-MEMS switch | 박흥우; 이덕중; 박윤권; 김철주; PARK JEONG HO; 서용교; 김정우; SONG CI MOO; OH MYUNG HWAN; Ju Byeong Kwon |
1992-01 | Short consideration on the non-uniformities existing at the etched-edges in deep anisotropic etching of (100) silicon | 주병권; 하병주; 김철주; 오명환; 차균현 |
- | Si micromachining for MEMS-IR sensor application | 박흥우; Ju Byeong Kwon; 박윤권; PARK JEONG HO; 김철주; Sang-Seop Yom; SUH SANG HEE; OH MYUNG HWAN |
1998-10 | Si micromachining for MEMS-IR sensor application | 박흥우; 주병권; 박윤권; 박정호; 김철주; 염상섭; 서상희; 오명환 |
2001-11 | Studies on Formation of the Floating Membrane using SOI Wafer and Application to Fabrication of Thermopile Sensor | 이성준; 주병권; 이윤희; 서상희; 오명환; 김태윤; 김철주 |
- | Study on the batch fabrication of silicon diaphragms | 하병주; Ju Byeong Kwon; 차균현; OH MYUNG HWAN; 김철주 |