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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
2026-01Analysis of metal-assisted chemical etching for microscale Si structures using Arrhenius methodChoi, Sunhae; Bong, Haekyun; Kim, Kyunghwan; Jeon, Sumin; Oh, Jungwoo
2025-03Modified Si Oxidation Behavior by Ultrathin Ni Catalyst Enabling Oxidant-Less Metal-Assisted Chemical EtchingKim, Kyunghwan; Choi, Sunhae; Bong, Haekyun; Oh, Jungwoo
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