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Showing results 1 to 4 of 4

Issue DateTitleAuthor(s)
-Actinic EUV Mask Inspection using Coherent EUV Light from High Harmonic GenerationMOON BYUNGHYUCK; Yong Soo Kim; Kim, Yong Tae; Hamin Sung; Jomsool Kim; Byeong-Kwon Ju; Jhon, Young Min
-Actinic EUV Mask Inspection using Coherent EUV Source based on High-order Harmonic GenerationKim Yong Soo; Park June; Park Han Young; Hamin Sung; Jomsool Kim; Seung Beom Lee; Hyun Woo Cho; Ju Han Lee; Park, Min-Chul; Jhon, Young Min
-Characteristics of the Coherent EUV Light Source for EUV MetrologyKim Yong Soo; Kim Younghee; Park June; Hamin Sung; Jomsool Kim; Ju Han Lee; Jhon, Young Min
-Optimization of High Harmonic Generation of Coherent EUV Light for EUV Metrology: Simulations and ExperimentsJung Min Ki; Yong Soo Kim; Kim Younghee; Kim, Yong Tae; Hamin Sung; Jomsool Kim; Ju Han Lee; Jhon, Young Min
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