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Issue DateTitleAuthor(s)
2016-11Characterization and Integration Performance of Methyl Silsesquioxane-Based Nano Porous Low-k Dielectric FilmsChoi, Eunmi; Nam, Minwoo; Kim, Areum; Kang, Keunwon; Zheng, Longshou; Kwon, Soon Hyeong; Yoon, Sung Pil; Hahn, Sang June; Kim, Soo-Kil; Son, Hyungbin; Pyo, Sung Gyu
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