Browsing by Author Woojin Jeon

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Showing results 1 to 5 of 5

Issue DateTitleAuthor(s)
2013-03Atomic Layer Deposition of SrTiO3 Films with Cyclopentadienyl-Based Precursors for Metal-Insulator-Metal CapacitorsWoongkyu Lee; Jeong Hwan Han; Woojin Jeon; Yeon Woo Yoo; Sang Woon Lee; 김성근; Chang-Hee Ko; Clement Lansalot-Matras; Cheol Seong Hwang
2014-12Chemistry of active oxygen in RuOx and its influence on the atomic layer deposition of TiO2 filmsWoojin Jeon; Woongkyu Lee; Yeon Woo Yoo; Cheol Hyun An; Jeong Hwan Han; 김성근; Cheol Seong Hwang
2014-04Controlling the Al-Doping Profile and Accompanying Electrical Properties of Rutile-Phased TiO2 Thin FilmsWoojin Jeon; Sang Ho Rha; Woongkyu Lee; Yeon Woo Yoo; Cheol Hyun An; Kwang Hwan Jung; 김성근; Cheol Seong Hwang
2014-12Evaluating the Top Electrode Material for Achieving an Equivalent Oxide Thickness Smaller than 0.4 nm from an Al-Doped TiO2 FilmWoojin Jeon; Sijung Yoo; Hyo Kyeom Kim; Woongkyu Lee; Cheol Hyun An; Min Jung Chung; 조철진; 김성근; Cheol Seong Hwang
2014-12Structure and Electrical Properties of Al-Doped HfO2 and ZrO2 Films Grown via Atomic Layer Deposition on Mo ElectrodesYeon Woo Yoo; Woojin Jeon; Woongkyu Lee; Cheol Hyun An; 김성근; Cheol Seong Hwang

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