Lee Woon Hee Song, Hyun - Cheol KANG, CHONG YUN Byeong Kwon Ju YOON, SEOK JIN 2024-01-12T22:38:05Z 2024-01-12T22:38:05Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/98608 English Energy harvesting MEMS Piezoelectrics Power generator Shear mode Analysis and Design of Spiral type MEMS Power Generator with Shear Mode Conference 1 International Conference on Electronic Materials and Nanotechnology for Green Environment 2010, pp.473 International Conference on Electronic Materials and Nanotechnology for Green Environment 2010 473 473 KO