Song, Hyun - Cheol Lee Woon Hee KANG, CHONG YUN YOON, SEOK JIN 2024-01-12T22:38:09Z 2024-01-12T22:38:09Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/98613 English MEMS Piezoelectric shear mode spiral energy harvesting Low Resonance Frequency Piezoelectric MEMS Harvester with Shear Mode Conference 1 International Workshop on Piezoelectric Materials and Applications in Actuators, pp.34 International Workshop on Piezoelectric Materials and Applications in Actuators 34 34 TU