JONG-KEUK, PARK Baik, Young Joon Lee, Wook Seong 2024-01-12T23:06:59Z 2024-01-12T23:06:59Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/99110 English nanoscale multilayered coating crystallization amorphous nitride phase hardness metal nitride Crystallization behavior of amorphous SiNx, BN and CNx phase with transition metal nitride (TiAlN and ZrN) layer in nanoscale multilayered coating Conference 1 12th International Conference on Plasma Surface Engineering (PSE 2010) 12th International Conference on Plasma Surface Engineering (PSE 2010) GW