Lee Seung-min Baik, Young Joon Lee, Wook Seong Tae-Yeon Seong JONG-KEUK, PARK 2024-01-12T23:07:00Z 2024-01-12T23:07:00Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/99111 English cBN gradient layer adhesion B4C sputtering Effect of gradient buffer layer prepared with different substrate bias on the adhesion of cBN film deposited by R.F. magnetron sputtering with B4C target and unipolar pulsed D.C. substrate bias Conference 1 10th APCPST (Asia Pacific Conference on Plasma Science and Technology) 10th APCPST (Asia Pacific Conference on Plasma Science and Technology) KO