안효석 OIEG Y. KOMKOV 김충현 SERGEI A.CHIZHI ANDREI M. DUBRA 2024-01-12T23:33:53Z 2024-01-12T23:33:53Z 2002-08-27 https://pubs.kist.re.kr/handle/201004/99472 SCANNING PROBE MICROSCOPE Patent 2002-08-27 2000-04-03 6,441,371 09/541,623 US 특허 한국과학기술연구원